Thank you, good suggestion but I think the accuracy quoted is 2mm - am I misreading the data sheet?
I'd be happy to receive other suggestions.
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Take a look at the TI capacitive sense board.
I think it can give you both the range of distance and the accuracy.
Any thoughts on this ... I'm trying to find a sensor to work with an Arduino (or similar) Micro-controller. The sensor needs to measure the distance to 500microns over a range of 50mm. Ideally measurements would be made at a >500Hz and the power consumption would need to minimal (or minimised). best I can find so far are all at 10-30V range with power consumption of about 0.5Watts.